Today's precision piezoelectric acoustic wave devices are designed with several essential features, including high quality factor (Q), low power consumption, compact size, and strict requirements for frequency and temperature stability, as well as force sensitivity. Since these devices serve critical roles in frequency standards and detection, their frequency performance must be upheld through precise design, manufacturing, and operational practices. Therefore, the analysis and design of these piezoelectric devices require accurate two-dimensional (2-D) or three-dimensional (3-D) models that reflect the resonator geometry, mountings, and material properties.
Additionally, models for nonlinear analysis must consider effects such as (1) temperature sensitivity, (2) applied forces from environmental vibrations, (3) harmonic generation, and (4) intermodulation. These models are essential for the design and analysis of acoustic resonators, as we have successfully extracted their electrical circuit parameters and identified major factors influencing their precise frequency performance.
The course will begin by addressing the fundamentals of accurate linear finite element modeling, focusing on frequency spectra and quality factor (Q) as functions of resonator geometry and mountings. We will present comparisons between model results and relevant experimental data. Following that, we will discuss the nonlinear finite element modeling of these devices, taking both linear and nonlinear material properties and deformations into account.
We will cover the linear and nonlinear material constants for common piezoelectric materials. The nonlinear behavior of quartz resonators will also be explored, including their frequency-temperature behavior, force-frequency effects, and nonlinear resonance, such as the Duffing effect. If time allows, we will present nonlinear frequency response modeling for force-frequency effects, harmonic generation, and intermodulation of bulk acoustic wave (BAW) and surface acoustic wave (SAW) resonators, comparing the results with experimental findings.
