Lyncée Tec is the world pioneer and leader of patented Digital Holographic Microscope (DHM®) technology, based in Lausanne, Switzerland. It offers matured DHM® based holographic microscopes for 4D (time-sequence of 3D) profilometry with unrivalled non-scanning acquisition speed, sub-nanometer resolution and in-situ process characterization for both in-plane and out of plane at the same time. Applications include MEMS analyzer, high-throughput semiconductor inspection, microfluid, liquid crystal and bio living cell etc. For MEMS dynamic characterization, DHM combined with stroboscopic unit enables full-field 3D measurements without any XYZ scanning, including frequency scan, in-plane and out of plane vibrations, impulse response detection. Advanced data processing software provide 3D dynamic video, 3D tracking on large in-plane motion device, and device vibration maps for full-field motion amplitude and phase distribution. Samples could be in vacuum, environment chamber of temperature control, or liquid immersion. Fast and economic data collection rate present DHM as a powerful in-line inspection tool for MEMS manufacturing and qualification.
