This course offers a comprehensive overview of the design and operation of these resonators. Core topics include the fundamentals of piezoelectric theory including linear and nonlinear stress-strain, dielectric, and piezoelectric relationships in thin films, acoustic wave propagation, dispersion analysis, and resonator design strategies emphasizing energy confinement and suppression of lateral modes.
The course will include:
Resonator modeling approaches, ranging from the phenomenological Butterworth–Van Dyke model, the physical one-dimensional Mason model, and two- and three-dimensional electro-acoustic multi-physics finite element models.
Nonlinear resonator models for harmonic emissions and intermodulation distortion.
Key metrological performance indicators for thin films and resonators, including quality factor and electro-mechanical coupling efficiency. We will compare Berlincourt and dynamic electro-mechanical coupling formulations across different material systems and layer thicknesses and discuss their import.
